NPGS: Radial Dots
This
image shows a pattern of radially placed dots in PMMA after development.
The white bar at the bottom of the image is 1 micron long. The pattern
was designed as radial lines, but the spacing of the exposure points was
set 0.3 microns to produce discrete dots. Notice how the dot size and spacing
is very consistent in all directions. The exposure was done with
an SEM with no beam blanker and the image was taken with the NPGS digital
imaging feature. (The original image was acquired with 512x512 pixels.
This copy has been reduced to 256x256 to shorten the downloading time.)
The pattern was written by Dr. ChiiDong Chen at the Institute of Physics,
Academia Sinica, Taiwan.