This
image shows one edge of a SAW (Surface Acoustic Wave) device after gold has
been electroplated to a thickness of 300 nm and the PMMA has been removed.
The gold lines are 130 nm wide and the spaces are about 70 to 80 nm wide.
This
image shows a SAW transducer that is patterned in 440 nm thick PMMA. The
lines and spaces are about 100 nm wide. These patterns were written by Dr.
Romuald Bobkowski at the University of Alberta in Canada.