NPGS Sample Pictures

NPGS Sample Pictures

Click the images below to see the full picture and a written summary. (Jump down to Diagnostic Images.)


Many Detailed Structures	Rose written in 1989	Hex Grid	45 Degree Box ~30 nm lines	Filled Polygons*	Radial Dots* 0.3 um spacing

Lines of 5nm Au Islands	Isolated Line ~12 nm width	Dense Lines 1:1 Line/Space ~10 nm lines	Dose Matrix 1:1 Line/Space to ~14 nm	Ice Lithography to ~9 nm	Air Bridge to Quantum Dot

Free-Standing AuPd Film	Melted AuPd Film	Dammann Grating 800 x 800 microns	Fine AuPd Wires ~30 nm wide	RAM Device	MEMS* Devices

Free-Standing Al Structures	Logarithmic Spirals*	Circular Grating	Circular Grating 0.15 um period	Deeply Etched Optical Resonator	Crossed Carbon Nanotubes from 1999

Double Bend Point Contact	Split Gate Structure	Large Bonding Pads for Split Gate	Electroplated SAW Devices	Electron Pump AFM image	Multilayer Cu/Co Wire
				E-Beam Deposition.......:
Dartmouth Seal*	Magnetic Loops* (using cFE SEM)	USA Map	Template Stripped Nanostructures		Electron Beam Induced Deposition (EBID)
FIB Milling........:
	FIB Milling: 300 nm Dots	FIB Milling: DaVinci's Vitruvian Man	FIB Milling: Escher drawing

Diagnostic Images - A Guide to Common SEM Lithography Exposure Problems:

While the images shown above demonstrate very good results in the wide range of applications that NPGS has been used for, when first learning to do lithography, it can be more important to know the cause of common problems. Consequently, the following images are shown to help new users diagnose common exposure problems. By clicking an image below, you will obtain a discussion of the problem displayed and/or instructions on the recommended approach for doing SEM lithography.

Also see the general SEM Optimization Guide and the SEM Lithography Setup Guide.


Gold Standard *	Contamination Spots	Charging #1 during imaging	Charging #2 during writing	Lift-Off*	Line Frequency Noise

Wheel #1 ~20 nm lines	Wheel #2*	Wheel #3*	Wheel #4 AFM Image	Wheel #5 AFM Image	Wheel #6

Bad Magnification	Bad Coating	Small Dots	10 kV Wheel	Negative PMMA	Double Exposure

* Image was acquired using the NPGS Digital Imaging Feature.

All images on this site are Copyright (c) by JC Nabity Lithography Systems unless otherwise noted. Permission to display these images for non-commercial uses will be given if a request is made in writing before such use and if proper reference to JC Nabity Lithography Systems is displayed with the image(s).